Gallium Arsenide VGF Single Crystal Furnace

  • Price:

    Negotiable

  • minimum:

  • Total supply:

  • Delivery term:

    The date of payment from buyers deliver within days

  • seat:

    Shandong

  • Validity to:

    Long-term effective

  • Last update:

    2019-01-26 10:54

  • Browse the number:

    224

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Company Profile

Qingdao Yuhao Microelectronics Equipment Co.,Ltd

By certification [File Integrity]

Contact:yuhao(Mr.)  

Email:

Telephone:

Phone:

Area:Shandong

Address:Shandong

Website:http://www.diffusionfurnace.com/ http://yuhao.tangqian010.com/

Product details

一..Equipment overview:   

 This equipment is mainly  used for crystal silicon solar cells, LED and other key electronic equipment  industry, suitable for 3-6 inches gallium arsenide VGF method single crystal  growth process, using computer software control mode. 
二.Parameters:

Mode

left/right operation    mode, vertical lifting

Number of tubes

1    tube system

Feeding mode

manual

Type of use

3-6 inches furnace tube

Type of work    piece

3-6    inches

Loading

10KG/Furnace

Temperature zone length

400-800mm

Working temperature

600~1310℃

Effective tube ID

¢100-180mm

Lifting stroke

1000mm

Minimum lifting speed

1mm/min

Total power

12-25KVA/tube   Insulation Power:6-12KVA/tube

3 Phase 5 Wire

380V±10%,50Hz±10%,the secondary wire is not less than 35 square high temperature line

Alarm

It has the functions of over temperature alarm, fault    couple alarm, gas interlock and so on.

Constant temperature zone

500mm in high temperature zone (8 sections for    temperature control) 300mm in low temperature zone (3 sections for    temperature control)

Temperature control precision

±0.5℃(≧1200℃)

single point temperature stability

±1℃/12h

Type (Temperature control)

Computer+    PLC

Thermocouple type

S/R thermocouple, Spike 4-7 per tube

Max. controllable temperature range:

(600~1300℃)0--15℃/min

Max. controllable cooling range:

(1300~600℃)0--10℃/min

Overall size

Size varies according to the equipment configuration

三.Main composition

1、

Equipment host

2、

Heating system

3、

Control system

4、

Heating system automatic pull-up mechanism

 

四.Main features and advantages of the equipment

1 Industrial computer control system (WINDOWS system interface,  easy and simple operation) has a powerful software function, friendly  man-machine interface, users can easily modify the process control parameters,  and can be displayed at any time a variety of process status; 

 2 High reliability industrial computer +PLC mode, the furnace  temperature, lifting stroke for automatic control, to achieve all process  automation;

 3 The program can achieve manual/automatic work, in the power  failure or midway stop, start again can be manually heated according to the  process, saving process time;

 4 With a variety of heating furnace body size pipeline,  convenient for users to choose;

 5. Heating body adopts automatic lifting control; 

 6. Multiple alarm functions and safety protection functions;

 7. High temperature control accuracy, good temperature stability

 8. With power off alarm, over/under temperature alarm, limit  over temperature alarm and other safety protection functions

 9. Good crystal growth uniformity and high repeatability

 Supporting equipment: synthetic furnace, ingot casting furnace,  deoxygenated tube sealing furnace, etc

http://www.diffusionfurnace.com/